![]() Original Assignee Cabot Microelectronics Corp Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) Kaufman Current Assignee (The listed assignees may be inaccurate. ( en Inventor Clifford Spiro George Steuer Frank B. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Expired - Fee Related, expires Application number US12/224,902 Other versions US20090103993A1 Google Patents Method of polishing a tungsten carbide surfaceÄownload PDF Info Publication number US8162723B2 US8162723B2 US12/224,902 US22490207A US8162723B2 US 8162723 B2 US8162723 B2 US 8162723B2 US 22490207 A US22490207 A US 22490207A US 8162723 B2 US8162723 B2 US 8162723B2 Authority US United States Prior art keywords polishing abrasive tungsten carbide workpiece titanium Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. ![]() Google Patents US8162723B2 - Method of polishing a tungsten carbide surface US8162723B2 - Method of polishing a tungsten carbide surface
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